2012
IEEE International Conference on Automation Science and Engineering (CASE)
Green
Automation toward a Sustainable Society
August
20-24, 2012
Grand
Hyatt Seoul, Seoul, Korea
4
special semiconductor sessions
Session
1: Process Control Automation
Session
2: Petri Nets in Automation
Session
3: Scheduling Methods for Semiconductor Manufacturing
Session
4: Modeling, Analysis and Operation of High Technology
Manufacturing
|
TuB2 Namsan
I Process Control Automation (Special Session) |
|
Chair: Cheng,
Fan-Tien (National Cheng Kung Univ) Co-Chair: Morrison, James (KAIST) |
|
13:00-13:20 TuB2.1 |
|
Managing Data for a Zero Defect Production – The
Contribution of Manufacturing Automation to a Corporate Strategy, pp. 70-73. Schmid, Gottfried (Infineon Tech. AG) Hanitzsch, Tilmann (Consultant) |
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13:20-13:40 TuB2.2 |
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Virtual-Metrology-Based FDC Scheme, pp. 80-85. Hsieh, Yao-Sheng (National Cheng Kung Univ) Cheng, Fan-Tien (National Cheng Kung Univ) Yang, Haw-Ching (National Kaohsiung First Univ. of Sci. and Tech) |
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14:00-14:20 TuB2.4 |
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Analysis of Defective Patterns on Wafers in
Semiconductor Manufacturing: A Bibliographical Review, pp. 86-90. Yum, Bong-Jin (KAIST) Koo, Jaehoon (Korea Advanced Inst. of Science and Tech) Kim, Seong-Jun (Gangneung Wonju National Univ) |
|
14:20-14:40 TuB2.5 |
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Multistep Virtual Metrology
Approaches for Semiconductor Manufacturing Processes, pp. 91-96. Pampuri, Simone (Univ. of Pavia, Italy) Schirru, Andrea (Univ. of Pavia, Italy) Susto, Gian Antonio (Univ. of Padova) Beghi, Alessandro (Univ. di Padova) De Nicolao, Giuseppe (Univ. of Pavia, Italy) Deluca, Cristina (Infineon Austria) |
|
Extra
session |
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Susto, Gian Antonio (University of Padova, Italy) Beghi, Alessandro (University of Padova, Italy) Schirru, Anarea (University of Pavia, Italy) Pampuri, Simone (University of Pavia, Italy) Nicolao, Giuseppe De (University of Pavia, Italy) |
|
TuC1
Grand Ballroom II Petri Nets in Automation (Regular Session) |
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Chair: Giua, Alessandro (Univ. of Cagliari) Co-Chair: Zhou, MengChu (New Jersey Inst. of Tech) |
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15:30-15:50 TuC1.1 |
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On Iterative Liveness-Enforcement for a Class of
Generalized Petri Nets, pp. 184-189. Hou, Yifan (Xidian Univ) Liu, Ding (Xidian Univ) Zhou, MengChu (New Jersey Inst. of Tech) |
|
15:50-16:10 TuC1.2 |
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Petri Net Decomposition Approach to Deadlock-Free
Scheduling for Dual-Armed Cluster Tools, pp. 190-195. Matsumoto, (Izuru Osaka Univ) Nishi, (Tatsushi Osaka Univ) |
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16:10-16:30 TuC1.3 |
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Scheduling of a Dual-Armed Cluster Tool with Two
Independent Robot Arms, pp. 196-201. Tonke, Daniel (KAIST, TU Munich) Lee, Tae-Eog (KAIST) |
|
16:30-16:50 TuC1.4 |
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Petri Net-Based Scheduling
Analysis of Dual-Arm Cluster Tools with Wafer Revisiting, pp. 202-207. Qiao, Yan (Guangdong Univ. of Tech) Wu, Naiqi (Guangdong Univ. of Tech) Zhou, MengChu (New Jersey Inst. of Tech) |
|
16:50-17:10 TuC1.5 |
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Scheduling of Petri Nets As a Multi-Objective
Shortest Path Problem, pp. 208-213. Wikborg, Uno (KAIST) Lee, Tae-Eog (KAIST) |
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17:10-17:30 TuC1.6 |
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A Comparison among Tools for the
Diagnosability of Discrete Event Systems, pp. 214-219. Cabasino, Maria Paola (Univ. of Cagliari) Giua, Alessandro (Univ. of Cagliari, Italy) Marcias, Laura (Univ. of Cagliari, Italy) Seatzu, Carla (Univ. of Cagliari) |
|
WeB1
Grand Ballroom II Scheduling Methods for Semiconductor Manufacturing (Special Session) |
|
Chair: Moench, Lars (Univ. of
Hagen) Co-Chair: Yugma, Claude (Ec.
des Mines de Saint-Etienne) |
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13:00-13:20 WeB1.1 |
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A Pull VPLs Based Release Policy and Dispatching
Rule for Semiconductor Wafer Fabrication, pp. 392-396. Li, You (Shanghai
Jiao Tong Univ) Jiang, Zhibin (Shanghai
Jiao Tong Univ) Jia, Wenyou (Shanghai Jiao Tong Univ) |
|
13:20-13:40 WeB1.2 |
|
Scheduling on Parallel Machines with Time
Constraints and Equipment Health Factor, pp. 397-402. Obeid, Ali (Ec NATIONALE
SUPERIEURE DES MINES DE SAINT ETIENNE CMP SGC) Dauzere-Peres, Stephane (France-Ec des Mines de Saint-Etienne - Centre Microélectroniq) Yugma, Claude (Ec des Mines
de Saint-Etienne) |
|
13:40-14:00 WeB1.3 |
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Dispatching Rule Considering
Time-Constraints on Processes for Semiconductor Wafer Fabrication Facility, pp. 403-408. L. Li (Tongji Univ) Y. F. Li (Tongji Univ) Z. J. Sun (Tongji Univ) |
|
14:00-14:20 WeB1.4 |
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An Exploratory Study of a Decomposition Heuristic
for Complex Shop Scheduling with Transportation, pp. 409-414. Driessel, Rene (Univ.
of Hagen) Moench, Lars (Univ.
of Hagen) |
|
14:20-14:40 WeB1.5 |
|
Bilyk, Andrew
(Univ. of Hagen) Moench, Lars (Univ.
of Hagen) |
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14:40-15:00 WeB1.6 |
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Criteria Evaluation Considering the Current Time
Used by a Genetic Scheduling Algorithm for Changeover and Tardiness Reduction, pp. 421-426. Dimitrov, Todor (Fraunhofer
Inst. of Optronics, System Tech. and Image) Baumann, Michael (Fraunhofer
Inst. of Optronics, System Tech. and Image) |
|
WeC3
Namsan II Modeling, Analysis and Operation of
High Technology Manufacturing (Special Session) |
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Chair: Zhang, Liang (Univ. of Wisconsin-Milwaukee) Co-Chair: Kalir, Adar (Intel Corp) |
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15:30-15:50 WeC3.1 |
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A Workflow Management System for
Cross-System Processes in Semiconductor Supply Chains, pp. 631-636. Russland, Tim Johannes (Infineon Tech. AG) Ehm, Hans (Infineon Tech. AG) Ponsignon, Thomas (Infineon Tech. AG) |
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15:50-16:10 WeC3.2 |
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Future Research Directions for Mastering End-To-End
Semiconductor Supply Chain, pp. 637-641. Ehm, Hans (Infineon Tech. AG) Ponsignon, Thomas (Infineon Tech. AG) |
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16:10-16:30 WeC3.3 |
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Segregating Preventive Maintenance Work for
Factory Performance Improvement, pp. 642-645. Kalir, Adar (Intel Corp) |
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16:30-16:50 WeC3.4 |
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On the Throughput of
Deterministic Flow Lines with Random State Dependent Setups: Stochastic
Models and Applications, pp. 646-651. Kim, Woosung (KAIST) Morrison, James (KAIST) |
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16:50-17:10 WeC3.5 |
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Real-Time Performance Analysis of Production
Lines: A System-Theoretic Approach, pp. 652-657. Chen, Guorong (Univ. of Wisconsin-Milwaukee) Zhang, Liang (Univ. of Wisconsin-Milwaukee) Arinez, Jorge (General Motors Res. & Development Center) Biller, Stephan (General Electric Corp) |
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Extra
session |
|
Morrison,
James (KAIST) Kyungsu,
Park (KAIST) |